Method for manufacturing patterned thin-film layer

ABSTRACT

A method for manufacturing a patterned thin-film layer includes the steps of: providing a substrate with a plurality of banks thereon, the plurality of banks defining a plurality of spaces therein for receiving ink therein, each of the banks having a top surface; providing a UV light source for emitting UV light toward the substrate; disposing a photo mask between the UV light source and the substrate; applying UV light on the substrate through the photo mask so as to reduce surface wettability of the ink on the top surfaces of the substrate, wherein the UV light is applied in a manner that the top surfaces of the banks are blocked by the photo mask and thus free of radiation from the UV light emitted from the UV light source; applying the ink into the spaces; and curing the ink so as to form a patterned thin-film layer on the substrate.

BACKGROUND

1. Field of the Invention

The present invention generally relates to a method for manufacturingpatterned thin-film layer on a substrate.

2. Description of Related Art

At present, methods for manufacturing a patterned thin-film layer on asubstrate include a photolithographic method and an ink-jet method.

The photolithographic method is described as below: applying aphotoresist layer on a substrate; exposing the photoresist layer using aphoto mask with a predetermined pattern and developing the exposedphotoresist layer using the conventional method to form a predeterminedpatterned thin-film layer. Disadvantage of the conventionalphotolithographic method is that a large part of the photoresistmaterial is wasted thus, the efficiency is lowered.

Referring to FIG. 7, the ink-jet method includes following steps:referring to FIG. 7( a), a substrate 42 with a plurality of banks 44thereon is provided, wherein the plurality of banks 44 defining aplurality of spaces 46 therein; the surfaces of the banks 44 isirradiated by ultraviolet (UV for short hereinafter) light beams 48perpendicular to the top surface of the banks 44. Referring to FIGS. 7(b) and 7(c), ink 54 is deposited into the spaces 46 by a nozzle 52. Apatterned thin-film layer (not shown) is formed after the ink 54 beingcured.

In the ink-jet method, ink with an appropriate viscosity and a surfacetension is necessary (see “the Fluid Property Dependency on Ink JettingCharacteristics”, Proceedings of the 2005 IEEE, pp. 258-260, 2005.11).Therefore, ink applied to the ink-jet method must have a certain levelof viscosity and a certain level of surface tension in order to increasesurface wettability of the ink on the substrate 42 and the banks 44.Alternatively, a method of irradiating the substrate 42 and the banks 44with UV light, as shown in FIG. 7( a), is being applied to increasesurface wettability of the ink on the substrate 42 and the banks 44.

In FIG. 7( a), the UV light beams 48 can decompose non-hydrophilesubstance, and thus increase the surface wettability of the top surfacesof the banks 44. If a material of the banks 44 is an organic material,the UV light beams 48 also can break the unsaturated links of theorganic material adjacent of the outer surface of the banks 44. Thiswill further increase the surface wettability of the top surface of thebanks 44. In FIG. 7( c), the UV light beams perpendicularly irradiatethe top surfaces of banks 44, which have better surface wettability thanthe side surfaces of banks 44. Therefore, when an ink 542 deposited inthe space 46 overflows to the top surface of the bank 44, the ink 542 isprone to flowing along the top surfaces of the bank 44 and is mixed withan ink 544 adjacent to the ink 542. This may reduce purity of the ink inthe same space.

What is needed, therefore, is a method for manufacturing a patternedthin-film layers with high purity of the ink in the same space.

SUMMARY

In a first present embodiment of the present invention, a method formanufacturing a patterned thin-film layer according to one presentembodiment includes the steps of: providing a substrate with a pluralityof banks thereon, the plurality of banks defining a plurality of spacestherein, each of the banks having a top surface; providing a UV lightsource and a photo mask, wherein the photo mask includes a UV lightpervious portion and a plurality of UV light-blocking portions, each ofthe UV light-blocking portions having a pattern same as the top surfacesof the banks; disposing the photo mask between the UV light source andthe substrate, wherein the UV light-blocking portion blocks the UV lightfrom being incident onto the top surfaces of the banks; irradiating thesubstrate and the banks with UV light; depositing ink into the spaces;and curing the ink so as to form a patterned thin-film layer on thesubstrate.

In a second present embodiment of the present invention, a method formanufacturing a patterned thin-film layer, comprising the steps of:providing a substrate with a plurality of banks thereon, the pluralityof banks defining a plurality of spaces therein for receiving inktherein, each of the banks having a top surface; providing a UV lightsource for emitting UV light toward the substrate; disposing a photomask between the UV light source and the substrate; applying UV light onthe substrate through the photo mask so as to reduce surface wettabilityof the ink on the top surfaces of the substrate, wherein the UV light isapplied in a manner that the top surfaces of the banks are blocked bythe photo mask and thus free of radiation from the UV light emitted fromthe UV light source; applying the ink into the spaces; and curing theink so as to form a patterned thin-film layer on the substrate.

Advantages and novel features will become more apparent from thefollowing detailed description of the present method for manufacturingpatterned thin-film layer when taken in conjunction with theaccompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

Many aspects of the present method for manufacturing patterned thin-filmlayer can be better understood with reference to the following drawings.The components in the drawings are not necessarily drawn to scale, theemphasis instead being placed upon clearly illustrating the principlesof the present method for manufacturing patterned thin-film layer.Moreover, in the drawings, like reference numerals designatecorresponding parts throughout the several views.

FIG. 1 is a cross-sectional view of a patterned thin-film layer inaccordance with a first present embodiment;

FIG. 2 is another cross-sectional view of a patterned thin-film layer ofFIG. 1, showing thickness of thin-film layers;

FIG. 3 is a flow chart of a method for manufacturing a patternedthin-film layer in accordance with a second present embodiment;

FIGS. 4 a to 4 c illustrate a manufacturing method of a patternedthin-film layer in accordance with the second present embodiment;

FIG. 5 is a cross-sectional view of a substrate with a plurality ofbanks thereon in accordance with a third present embodiment;

FIG. 6 is a cross-sectional view of a substrate with a plurality ofbanks in accordance with a fourth present embodiment; and

FIGS. 7 a to 7 c illustrate a conventionally method for manufacturing apatterned thin-film layer.

Corresponding reference characters indicate corresponding partsthroughout the drawings. The exemplifications set out herein illustrateat least one present embodiment of the present method for manufacturingpatterned thin-film layer, in one form, and such exemplifications arenot to be construed as limiting the scope of the invention in anymanner.

DETAILED DESCRIPTION OF THE EMBODIMENT

Reference will now be made to the drawings to describe presentembodiments of the present method for manufacturing patterned thin-filmlayer using same, in detail.

Referring to FIGS. 1 and 2, a patterned thin-film layer 100 inaccordance with a first present embodiment is shown. The patternedthin-film layer 100 includes a substrate 102, a plurality of banks 104formed on the substrate 102, and a plurality of thin-film layers 106.

A material of the substrate 102 is selected from the group consisting ofglass, quartz glass, silicon wafer, metal and plastic. The plurality ofbanks 104 defines a plurality of spaces therein, and the spaces arearranged in rows and columns on the substrate 102. The thin-film layers106 in each row are made of same ink, and the thin-film layers 106 inevery three rows include a first thin-film layer 106R, a secondthin-film layers 106G and a third thin-film layer 106B arranged in arepeating order.

Referring to FIG. 3, a flow chart of a method for manufacturing apatterned thin-film layer in accordance with a second present embodimentis shown. The method mainly includes the steps of: 112 a: providing asubstrate with a plurality of banks thereon, the plurality of banksdefining a plurality of spaces therein, the plurality of spaces arrangedin rows and columns; 112 b: providing a UV light source and a photomask, wherein the photo mask includes a UV light pervious portion and aplurality of UV light-blocking portions, each of the UV light-blockingportions having a same pattern as the top surfaces of the banks; 112 c:disposing the photo mask between the UV light source and the substrate,wherein the UV light-blocking portions block the UV light from incidentonto the top surfaces of the banks; 112 d: irradiating the substrate andthe banks with UV light; 112 e: depositing ink into the spaces; 112 f:curing the ink so as to form a patterned thin-film layer on thesubstrate.

With reference to FIG. 4( a), in step 112 a, a substrate 102 with aplurality of banks 104 thereon is provided. A material of the substrate102 is selected from the group consisting of glass, quartz glass,silicon wafer, metal and plastic. A material of the banks 104 can bephotoresist resin. In the present embodiment, the substrate 102 is aglass substrate. The plurality of banks 104 defines a plurality ofspaces 107 therein. Generally, the plurality of spaces 107 is arrangedin rows and columns. Each of the banks 104 has a plurality of sidesurfaces 104 a and a top surface 104 b. Each of the side surfaces 104 ais inclined with respect to the substrate 102. An inclination angle θthat the side surfaces 104 a with respect to the substrate 102 issmaller than 90 degrees. Also, the spaces 107 can be arranged in amosaic style or an abnormity style etc.

In step 112 b, a UV light source 60 and a photo mask 200 is provided.The UV light source 60 emits UV light 109. The UV light source 60 ispreferably a straight tube UV lamp with low pressure therein. Awavelength of the UV light source 60 is preferably shorter than 320nanometers. The photo mask 200 includes a UV light pervious portion 200a and a plurality of UV light-blocking portion 200 b formed on the UVlight pervious portion 200 a corresponding with 104. The UVlight-blocking portions 200 b have a same pattern as the top surfaces104 b of the banks 104. In step 112 c, the photo mask 200 is disposedbetween the UV light source 60 and the substrate 102. The UVlight-blocking portions 200 b overcast the top surfaces 104 b of thebanks 104 so as to block UV light 109 emitted from the UV light source60 to the top surfaces 104. It is to be understood that the UVlight-blocking portion 200 b also can be arranged in the UV lightpervious portion 200 a. A material of the photo mask 200 can be selectedfrom a group consisting of Chromium and resin material.

In step 112 d, the UV light source 60 emits UV light 109 perpendicularto the top surfaces 104 b. One part of the UV light 109 is blocked bythe UV light-blocking portions 200 b so that the top surfaces 104 breceive no UV light 109. Another part of the UV light 109 passes throughthe UV light pervious portion 200 a onto the side surfaces 104 a and thesurfaces of the substrate 102. As a result, surface wettability of theside surfaces 104 a and the surfaces of the substrate 102 are increased.It is to be understood that the UV light 109 also can incline withrespect to the top surfaces 104 b.

Referring to FIG. 4( b), in step 112 e, ink 108 of a desired material isdeposited into the spaces 107 to form ink layers 110 using an ink-jetdevice 300. The ink-jet device 300 includes an ink-jet head 302 with anozzle 304 formed thereon. The ink layers 110 deposited in every threerows comprises a first ink layer 110R, a second ink layer 110G and athird ink layer 110B arranged in a repeating order.

Referring to FIGS. 4( b) and 4(c), in step 112 f, the ink layers 110 inthe spaces 107 are cured by a curing device (not shown), such as aheating device or an ultraviolet light source, so as to form a pluralityof thin-film layers 106. The thin-film layers 106 includes a firstthin-film layer 106R, a second thin-film layer 106G, and a thirdthin-film layer 106B corresponding to the first ink layer 110R, thesecond ink layer 110G and the third ink layer 110B respectively. Aheating device and a vacuum-pumping device can also be used for curingthe ink layers 110 defined by the banks 104.

Because the UV light-blocking portions 200 b of the photo mask 200 blockthe UV light 109 emitted from the UV light source 60 to the top surfaces104 b of the banks 104, surface wettability of the top surfaces 1042 isweak. When the first ink layer 110R overflows to the top surface 1042,the first ink layer 110R has a high surface tension and is not prone toflowing to the adjacent second ink layer 110G. This may prevent adjacentink layers from mixing.

Besides, referring to FIG. 5, the substrate 102 with another banks 206are illustrated in accordance with a third present embodiment. In thispresent embodiment, side surfaces 208 of the banks 206 and the surfaceof the substrate form an angle γ. The angle γ is 90 degrees.

In addition, a substrate 202 and a plurality of banks 204 areillustrated in accordance with a fourth present embodiment, as shown inFIG. 6. The substrate 202 and the plurality of banks 204 are similar asthe substrate 102 and the plurality of banks 206, and the difference isthat the substrate 202 and the plurality of banks 204 are integrallymolded.

It is to be understood that the above-described embodiment is intendedto illustrate rather than limit the invention. Variations may be made tothe embodiment without departing from the spirit of the invention asclaimed. The above-described embodiments are intended to illustrate thescope of the invention and not restrict the scope of the invention.

1. A method for manufacturing a patterned thin-film layer, comprisingthe steps of: providing a substrate with a plurality of banks thereon,the plurality of banks defining a plurality of spaces therein, each ofthe banks having a top surface; providing a UV light source and a photomask, wherein the photo mask includes a UV light pervious portion and aplurality of UV light-blocking portions, each of the UV light-blockingportions having a pattern same as the top surfaces of the banks;disposing the photo mask between the UV light source and the substrate,wherein the UV light-blocking portion blocks the UV light from beingincident onto the top surfaces of the banks; irradiating the substrateand the banks with UV light; depositing ink into the spaces; and curingthe ink so as to form a patterned thin-film layer on the substrate. 2.The method as claimed in claim 1, wherein a material of the photo maskis Chromium.
 3. The method as claimed in claim 1, wherein a material ofthe banks is photoresist resin.
 4. The method as claimed in claim 1,wherein a wavelength of the UV light source is shorter than 320nanometers.
 5. The method as claimed in claim 1, wherein the UV lightsource is a straight tube UV lamp with low pressure therein.
 6. Themethod as claimed in claim 1, wherein the light beams emitted from theUV light source is perpendicular to the top surfaces of the banks. 7.The method as claimed in claim 1, wherein the ink is deposited in thespaces using an ink-jet device, and the ink-jet device comprises anink-jet head.
 8. The method as claimed in claim 1, wherein the ink iscured by at least one device selected from the group consisting of aheating device, a vacuum pump, and a light-exposure device.
 9. Themethod as claimed in claim 8, wherein the light-exposure device is anultraviolet light source.
 10. A method for manufacturing a patternedthin-film layer, comprising the steps of: providing a substrate with aplurality of banks thereon, the plurality of banks defining a pluralityof spaces therein for receiving ink therein, each of the banks having atop surface; providing a UV light source for emitting UV light towardthe substrate; disposing a photo mask between the UV light source andthe substrate; applying UV light on the substrate through the photo maskso as to reduce surface wettability of the ink on the top surfaces ofthe substrate, wherein the UV light is applied in a manner that the topsurfaces of the banks are blocked by the photo mask and thus free ofradiation from the UV light emitted from the UV light source; applyingthe ink into the spaces; and curing the ink so as to form a patternedthin-film layer on the substrate.
 11. The method as claimed in claim 10,wherein a material of the photo mask is Chromium.
 12. The method asclaimed in claim 10, wherein a material of the banks is photoresistresin.
 13. The method as claimed in claim 10, wherein a wavelength ofthe UV light source is shorter than 320 nanometers.
 14. The method asclaimed in claim 10, wherein the UV light source is a straight tube UVlamp with low pressure therein.
 15. The method as claimed in claim 10,wherein the light beams emitted from the UV light source isperpendicular to the top surfaces of the banks.